Foest, R.
, Olthoff, J.
, Van brunt, R.
, Benck, E.
and Roberts, J.
(1996),
Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF<sub>6</sub> Radio-Frequency Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
(Accessed January 13, 2025)
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Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges
Published
Author(s)
R Foest, , R J. Van brunt, ,
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
54
Issue
2
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1995, Updated October 12, 2021