Kopanski, J.
, Marchiando, J.
and Alvis, R.
(1997),
Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version, Extended Abstracts of the Electrochemical Society, Montreal, 1, CA
(Accessed July 27, 2024)
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Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version
Published
Author(s)
, , R. Alvis
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
May 4-9, 1997
Conference Location
Montreal, 1, CA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1997, Updated October 12, 2021