VanderHart, D.
, Prabhu, V.
and Lin, E.
(2004),
Proton NMR Determination of Miscibility in a Bulk Model Photoresist System: Poly(4-hydroxystyrene) and the Photoacid Generator, Di-(t-butylphenyl) Iodonium Perfluorooctanesulfonate, Chemistry of Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853953
(Accessed December 22, 2024)
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Proton NMR Determination of Miscibility in a Bulk Model Photoresist System: Poly(4-hydroxystyrene) and the Photoacid Generator, Di-(t-butylphenyl) Iodonium Perfluorooctanesulfonate
Published
Author(s)
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Citation
Chemistry of Materials
Volume
16(16)
Pub Type
Journals
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Keywords
Blends, Electronic Materials, Lithography, Microstructure, NMR, Spectroscopy, iodonium sulfonate, miscibility, photoacid generator, photoresist, poly(hydroxystyrene), proton, spin diffusion
Citation
Issues
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Created January 1, 2004, Updated February 17, 2017