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Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry

Published

Author(s)

P Chi, David S. Simons, Peter Roitman
Citation
Surface and Interface Analysis
Volume
17

Citation

Chi, P. , Simons, D. and Roitman, P. (1991), Quantitative Analysis of Impurities in SIMOX Samples Using Secondary Ion Mass Spectrometry, Surface and Interface Analysis (Accessed December 21, 2024)

Issues

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Created December 30, 1991, Updated October 12, 2021