Postek, M.
, Larrabee, R.
and Keery, W.
(1987),
Scanning Electron Microscope Linewidth Measurement Standards Programat the National Bureau of Standards, EMSA Bulletin
(Accessed March 14, 2025)
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Scanning Electron Microscope Linewidth Measurement Standards Programat the National Bureau of Standards
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Created December 31, 1987, Updated February 19, 2017