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Displaying 2501 - 2525 of 2609

Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

May 1, 1994
Author(s)
Michael W. Cresswell, William B. Penzes, Robert Allen, L Linholm, C Ellenwood, E C. Teague
This test structure is based on the voltage-dividing potentiometer principle and was originally replicated in a single lithography cycle to evaluate feature placement by a primary pattern generator. A new test structure has now been developed from the

Photoreflectance Study of the Chemically Modified (100) GaAs Surface

May 1, 1994
Author(s)
John A. Dagata, O Glembocki, J Tuchman, K Ko, S Pang
Photoreflectance (PR) spectroscopy has been used to study the Fermi-level pinning position of chemically modified (100) GaAs surfaces. It is shown that there are two pinning positions for the unmodified (100) GaAs surface. For n-GaAs, the Fermi level pins

The Measurement of the Pile-up Topography of Hardness Indentations

April 1, 1994
Author(s)
L Blunt, P Sullivan
A number of indentations were made in 70:30 brass specimens. The resulting surface disturbance was analyzed using a stylus-based 3D topography measuring instrument. Numerical methods based on progressive truncation routines were developed in order to

The Measurement and Uncertainty of a Calibration Standard for the SEM

March 1, 1994
Author(s)
Joseph Fu, M Croarkin, Theodore V. Vorburger
Standard Reference Material 484 is an artifact for calibration the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000X to 20000X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992

The Effects of Quantization on 3D Topography Characterization

February 1, 1994
Author(s)
E Mainsah, P Sullivan, K Stout
This paper investigates the influence of quantization on 3D surface characterization by carrying out an analysis of surface parameter changes on a range of real and simulated surfaces. The changes in parameters are calculated as a percentage of the

A Calibrated Atomic Force Microscope

January 1, 1994
Author(s)
T Mcwaid, J Schneir
Atomic force microscope (AFM) is a rapidly emerging measurement technology. As the technology develops, it is being incorporated into industrial research and development, and manufacturing facilities. At present there are no sub-micrometer pitch or sub-ten

A High Accuracy Micrometer for Diameter Measurements of Cylindrical Standards

January 1, 1994
Author(s)
John R. Stoup, Theodore D. Doiron
NIST has developed a new instrument to measure cylindrical standards including thread wires and plain plug gages. The instrument uses a laser interferometer system which is coupled with an air bearing linear motion slide and precise contact geometry to

A New Method to Measure the Distance Between Graduation Lines on Graduated Scales

January 1, 1994
Author(s)
William B. Penzes, Robert Allen, Michael W. Cresswell, L Linholm, E C. Teague
Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not

A Novel CMM Interim Testing Artifact

January 1, 1994
Author(s)
Steven D. Phillips, Bruce R. Borchardt, Gregory W. Caskey, David E. Ward, Bryon S. Faust, Daniel S. Sawyer
NIST is currently developing equipment and techniques to rapidly access the performance of Coordinate Measuring machines (CMMs). This will allow the frequent testing of CMMs to insure that they measure parts accurately. A novel interim testing artifact

A Study of the Surface Texture of Polycrystalline Phosphor Films Using AFM

January 1, 1994
Author(s)
Zsolt R?vay, J Schneir, D Brower, John S. Villarrubia, Joseph Fu, et al
Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of the

Critical Issues in Scanning Electron Microscope Metrology

January 1, 1994
Author(s)
Michael T. Postek
During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high degree of repeatability. Optical microscopy, scanning electron microscopy, and the various forms

Force Calibrations in the Nanonewton Regime

January 1, 1994
Author(s)
Lowell P. Howard, E C. Teague
An instrument is described which is shown capable of making preliminary measurements of nanonewton forces. A technique is described which allows absolute calibrations of small forces to be made in terms of electrical measurements.

Hertzian Contact Resonances

January 1, 1994
Author(s)
John A. Kramar, T Mcwaid, J Schneir, E C. Teague
The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic moduli. Comparisons were made with predictions based on the Hertzian theory of elastic deformation

Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features

January 1, 1994
Author(s)
T Mcwaid, Theodore V. Vorburger, Joseph Fu, Jun-Feng Song, Eric P. Whitenton
Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric microscope. The differences between measurements of the same surface feature as obtained with the

Microform Calibrations in Surface Metrology

January 1, 1994
Author(s)
Jun-Feng Song, F Rudder, Theodore V. Vorburger, A Hartman, Brian R. Scace, J Smith
Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of deviations from a specified profile and surface texture of profile segments. Tolerances on the profile

Morphological Estimation of Tip Geometry for Scanned Probe Microscopy

January 1, 1994
Author(s)
John S. Villarrubia
Morphological constraints inherent in the imaging process limit the possible shapes of the tip with which any given tunneling microscope or atomic force microscope image could have been taken. Broad tips do not produce narrow image protrusions. Therefore
Displaying 2501 - 2525 of 2609