October 12, 2021
Author(s)
M A. Mastro, O M. Kryliouk, T J. Anderson, Albert Davydov, Alexander J. Shapiro
A comparative study of the stability of Ga- and N-polar GaN films was made in different gas ambients (N2, H2, NH3, HCl). The Ga-polar films were observed to undergo a dissociative sublimation, while the N-polar films formed condensed Ga in addition to the