May 18, 2007
Author(s)
Nabil Bassim, Peter K. Schenck, Eugene Donev, Edwin J. Heilweil, Eric J. Cockayne, Martin L. Green, Leonard Feldman
In Pulsed-Laser Deposition (PLD), there are many processing parameters that influence film properties which may be studied such as substrate-target distance, background reactive gas pressure, laser energy, substrate temperature and composition in multi