March 28, 2007
Author(s)
Brian C. Okerberg, Christopher L. Soles, Jack F. Douglas, Hyun Wook Ro, Alamgir Karim
The crystallization behavior of poly(ethylene oxide) (PEO) films patterned by nanoimprint lithography is studied. The imprinted PEO film consists of parallel lines, approximately 240 nm wide and 320 nm tall, on a 400 nm pitch with a residual layer of