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Search Publications by: Richard S. Gates (Assoc)

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Displaying 26 - 50 of 116

High Confidence Level Calibration for AFM Based Fracture Testing of Nanobeams

June 11, 2012
Author(s)
Scott Grutzik, Richard S. Gates, Yvonne B. Gerbig, Robert F. Cook, Melissa Hines, Alan Zehnder
When designing micro- or nanoelectromechanical systems, (MEMS and NEMS), it is important to consider whether structural elements will withstand loads experienced during operation. Fracture behavior at length scales present in MEMS and NEMS is much di erent

Deformation and fracture of single-crystal silicon theta-like specimens

October 28, 2011
Author(s)
Michael S. Gaither, Frank W. DelRio, Richard S. Gates, Robert F. Cook
Miniaturized test specimens of single-crystal silicon, fabricated by lithography and deep reactive ion etching (DRIE), were used to measure deformation and fracture properties at the micro scale. Two specimen geometries, both in the form of a Greek letter

Prototype cantilevers for quantitative lateral force microscopy

September 27, 2011
Author(s)
Mark Reitsma, Richard S. Gates, Lawrence H. Friedman, Robert F. Cook
Prototype cantilevers that enable quantitative micro- to nano-scale surface force measurements using contact-mode atomic force microscopy (AFM) are presented. The “Hammerhead” cantilevers allow precise optical lever system calibrations for cantilever

Structure-property relationships for methyl-terminated alkyl self-assembled monolayers

July 20, 2011
Author(s)
Frank W. DelRio, Dave Rampulla, Cherno Jaye, Gheorghe Stan, Richard S. Gates, Daniel A. Fischer, Robert F. Cook
Structure-property relationships for methyl-terminated alkyl self-assembled monolayers (SAMs) are developed using near-edge X-ray absorption fine structure spectroscopy (NEXAFS) and atomic force microscopy (AFM). NEXAFS C K-edge spectra are used to compute

Strength distribution of single-crystal silicon theta-like specimens

May 18, 2010
Author(s)
Michael S. Gaither, Frank W. DelRio, Richard S. Gates, Edwin R. Fuller, Robert F. Cook
A new test specimen has been developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results

Theta-like specimen to determine tensile strength at the micro-scale

March 10, 2010
Author(s)
Michael S. Gaither, Frank W. DelRio, Richard S. Gates, Edwin R. Fuller, Robert F. Cook
Micro- and nano-electromechanical systems are typically formed via lithographic and etching processes that leave residual surface features, stresses, and chemistry that ultimately control component strength and device reliability. Here, we describe a new

Prototype Cantilevers for AFM Nanomechanical Property Measurement

October 2, 2009
Author(s)
Richard S. Gates, Mark Reitsma
Atomic Force Microscopy (AFM) is a widely used technique for imaging surfaces and measuring properties at the micro and nano-scales; however, the accuracy and precision of these measurements is hampered by the lack of suitable traceable standards and