February 1, 2004
Author(s)
Joseph Kopanski, Jay F. Marchiando, Brian G. Rennex, David S. Simons, R P. Chaudhury
SCM images, and the two-dimensional (2-D) dopant profiles extracted from them, show poor reproducibility from laboratory to laboratory. Major factors contributing to SCM image variability include: poor sample surface and oxide quality, excess carrier