Publications

Displaying 76 - 100 of 136

Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges

August 1, 1995

Author(s)

Richard J. Van Brunt, James K. Olthoff, S. B. Radovanov

Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges

July 1, 1995

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov

Ion Kinetic-Energy Distributions and Balmer-alpha (H?) Excitation in Ar-H2-Radio-Frequency Discharges

July 1, 1995

Author(s)

S. B. Radovanov, James K. Olthoff, Richard J. Van Brunt, S. Djurovic

Kinetic Energy Distribution of Ions Produced from Townsend Discharges in Neon and Argon

July 1, 1995

Author(s)

MVVS. Rao, S. B. Radovanov, Richard J. Van Brunt, James K. Olthoff

Kinetic Energy Distributions of H+, H2+, and H3+ from a Diffuse Townsend Discharge in H2 at High E/N

July 1, 1995

Author(s)

MVVS. Rao, Richard J. Van Brunt, James K. Olthoff

Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell

July 1, 1995

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov

The Gaseous Electronics Conference RF Reference Cell?An Introduction

July 1, 1995

Author(s)

James K. Olthoff, K E. Greenberg

Ion Kinetics and Symmetric Charge-transfer Collisions in Low-current, Diffuse (Townsend) Discharges in Argon and Nitrogen

June 1, 1995

Author(s)

S. B. Radovanov, Richard J. Van Brunt, James K. Olthoff, Branislav M. Jelenkovic

Time-resolved Balmer-alpha Emission from Fast Hydrogen Atoms in Low Pressure, Radio-Frequency Discharges in Hydrogen

May 1, 1995

Author(s)

S. B. Radovanov, Krzysztof Dzierzega, J R. Roberts, James K. Olthoff

Appearance Potentials of Ions Produced by Electron-Impact Induced Dissociative Ionization of SF 6 and Related Compounds

March 1, 1995

Author(s)

Ken L. Stricklett, J. M. Kassoff, James K. Olthoff, Richard J. Van Brunt

Methods are described, which are based on the use of a commercial mass spectrometer, for determination of ionization and fragment ion appearance potentials by electron impact. These methods are applied to the principal sulfur-bearing compounds produced by

Decomposition of Sulfur Hexafluoride by X-rays

March 1, 1995

Author(s)

James K. Olthoff, Richard J. Van Brunt

Procedure for Measuring Trace Quantities of S2F10, S2OF10, and S2O2F10 in SF6 Using a Gas Chromatograph-Mass Spectrometer

March 1, 1995

Author(s)

Richard J. Van Brunt, James K. Olthoff, Ken L. Stricklett, D Wheeler

Electrical Sensors for Monitoring rf Plasma Sheaths

May 1, 1994

Author(s)

Mark A. Sobolewski, James K. Olthoff

Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures

March 1, 1994

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov, J. A. Rees

Kinetic-Energy Distributions of Ions Sampled from Argon Plasmas in a Parallel-Plate Radio Frequency Reference Cell

January 1, 1994

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov, J. A. Rees, R. Surowiec

The Gaseous Electronics Conference radio-frequency reference cell: a defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma processing discharges

January 1, 1994

Author(s)

P J. Hargis, Jr, K E. Greenberg, P A. Miller, J B. Gerardo, J R. Torczynski, M E. Riley, G A. Hebner, J R. Roberts, James K. Olthoff, J R. Whet-stone, R R. Van brunt, M A. Sobolewski, H M. Anderson, M P. Splichal, J L. Mock, P Bletzinger, A Garscadden, R A. Gottscho, G Selwyn, M Dalvie, J E. Heidenreich, J W. Butter-baugh, M L. Brake, M L. Passow, J Pender, A Lujan, M E. Elta, D Graves, H H. Sawin, M J. Kuschner, J T. Verdeyen, R Horwath, T R. Turner