January 12, 2019
Author(s)
Gery R. Stafford, Ugo Bertocci
In situ cantilever curvature is used to quantify the growth stress in Co thin films, electrodeposited from an electrolyte consisting of 0.5 mol/L Na2SO4, 0.5 mol/L H3BO3, and 0.1 mol/L CoSO4 . 7 H20. The average biaxial steady-state stress is measured as a