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Search Publications by: Robert E Vest (Fed)

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Displaying 1 - 25 of 140

NIST efforts in extreme-ultraviolet metrology

November 21, 2023
Author(s)
Charles S. Tarrio, Steven Grantham, Rob Vest, Thomas A. Germer, Bryan Barnes, Stephanie Moffitt, Brian Simonds, Matthew Spidell
For several decades, the National Institute of Standards and Technology (NIST) has actively supported metrology programs for extreme ultraviolet (EUV) lithography. We will describe our existing programs in optics lifetime, reflectometry, and radiometry

Diffuse Visual Transmission Density

August 17, 2022
Author(s)
Clarence Zarobila, Robert E. Vest, Maria E. Nadal
This document, SP250-99 (2022), NIST Measurement Services: Diffuse Visual Transmission Density, describes the instrument used to measure diffuse visual transmission density of both x-ray and photographic film step tablets. These step tablets replace former

A constant pressure flowmeter for the extremely high vacuum

August 9, 2022
Author(s)
Stephen Eckel, Daniel Barker, James A. Fedchak, Emmanuel Newsome, Julia Scherschligt, Robert E. Vest
We demonstrate operation of a constant-pressure flowmeter capable of generating and accurately measuring flows as low as $1\times10^-13}$mol/s. Generation of such small flows is accomplished by using a small conductance element with $C\approx 25$nL/s

Broadband Radiometric LED Measurements

September 6, 2016
Author(s)
George P. Eppeldauer, P. Yvonne Barnes, Howard W. Yoon, Leonard Hanssen, Vyacheslav B. Podobedov, Robert E. Vest, Uwe Arp, C Cameron Miller
At present, broadband radiometric measurements of LEDs with uniform and low-uncertainty results are not available. Currently, either spectral radiometric measurements or broadband photometric LED measurements are used. The broadband photometric

The New SURF Beamline 3

May 18, 2016
Author(s)
Robert E. Vest
A new beamline is being commissioned at the Synchrotron Ultraviolet Radiation Facility (SURF III) on the Gaithersburg, MD campus of the National Institute of Standards and Technology (NIST). SURF III is a 380-MeV synchrotron radiation source providing

Calibration procedure for UV-365 integrated irradiance measurements

September 8, 2015
Author(s)
George P. Eppeldauer, Thomas C. Larason, Robert E. Vest, Uwe Arp, Howard W. Yoon
Since the CIE standardized rectangular-shape spectral response function for the 320 nm to 400 nm wavelength range can be realized only with large spectral mismatch, the realized UV-A meters have different response functions resulting in large errors in

IR-enhanced Si reference detectors for 1-step scale transfers from 300 nm to 1000 nm

November 20, 2014
Author(s)
George P. Eppeldauer, Thomas C. Larason, Jeanne M. Houston, Robert E. Vest, Uwe Arp, Howard W. Yoon
IR-enhanced Si photodiodes have improved radiometric and electronic characteristics as compared to other widely used Si photodiodes and can be used as responsivity standards in the wavelength range from 300 nm to 1000 nm. Their low predicted uncertainty

Noble Gas Excimer Scintillation Following Neutron Capture in Boron Thin Films

April 11, 2014
Author(s)
Alan K. Thompson, Jacob McComb, Charles W. Clark, Michael A. Coplan, Mohamad Al-Sheikhly, Robert E. Vest
Far-ultraviolet (FUV) scintillation signals have been measured in heavy noble gases (argon, krypton, xenon) following boron-neutron capture (10B(n,α)7Li) in 10B thin films. The observed scintillation yields are comparable to the yields from some liquid and

First Report on Quantum Dot Coated CMOS CID Arrays for the UV and VUV

December 13, 2013
Author(s)
Uwe Arp, Robert E. Vest, Zoran Ninkov, Ross Robinson, Suraj Bhaskaran
A technique has been developed for coating commercial off the shelf (COTS) detector arrays with a thin, uniform layer of quantum dots. The quantum deposition is accomplished using an Optomec Aerosol Jet rapid prototyping system. When illuminated by UV

SURF III: A flexible Synchrotron Radiation Source for Radiometry and Research

September 1, 2011
Author(s)
Uwe Arp, Charles W. Clark, Lu Deng, Nadir S. Faradzhev, Alex P. Farrell, Mitchell L. Furst, Steven E. Grantham, Edward W. Hagley, Shannon B. Hill, Thomas B. Lucatorto, Ping-Shine Shaw, Charles S. Tarrio, Robert E. Vest
The calculability of synchrotron radiation (SR) makes electron storage rings wonderful light sources for radiometry. The broadband nature of SR allows coverage of the whole spectral region from the x-ray to the far-infrared. Compact low-energy storage

Far-ultraviolet signatures of the 3He(n,tp) reaction in noble gas mixtures

December 8, 2010
Author(s)
Patrick Hughes, Alan K. Thompson, Michael Coplan, Robert E. Vest, Charles W. Clark
Previous work showed that the 3He(n,tp) reaction in a cell of 3He at atmospheric pressure generated tens of far-ultraviolet photons per reacted neutron. Here we report amplification of that signal by factors of 1000 and more when noble gases are added to

Tracking down sources of carbon contamination in EUVL exposure tools

August 3, 2009
Author(s)
Charles S. Tarrio, Robert E. Vest, Thomas B. Lucatorto, R. Caudillo
Optics in EUVL exposure tools are known to suffer reflectivity degradation, mostly from the buildup of carbon. The sources of this carbon have been difficult to identify. Vacuum cleanliness is normally monitored with a residual gas analyzer, but this has