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Search Publications by: Robert E Vest (Fed)

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Displaying 26 - 50 of 119

A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline

April 1, 2005
Author(s)
Charles S. Tarrio, Steven E. Grantham, Robert E. Vest, K Liu
Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We have

Improved Radiometry For Extreme-Ultraviolet Lithography

November 1, 2004
Author(s)
Charles S. Tarrio, Robert E. Vest, Steven E. Grantham, K Liu, Thomas B. Lucatorto, Ping-Shine Shaw
The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements are

Large Area Pt/n-GaN Schottky Photodiodes With Extremely Low Leakage Current

August 19, 2004
Author(s)
A Shahid, Robert E. Vest, D Franz, F Yan, Y Zhao, D B. Mott
Pt/n-type GaN Schottky photodiodes with very large active areas (0.25 cm 2 and 1 cmu2 ) which exhibit extremely low leakage currents at low reverse bias are reported. The Schottky photodiodes were fabricated from n-/n+ epitaxial layers grown by low

Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings

July 1, 2004
Author(s)
D R. McMullin, D L. Judge, Charles Tarrio, Robert E. Vest, F Hanser
We report the results of transmission and diffraction measurements at EUV wavelengths (4-30 nm) for two gratings, one with a line density of 5000 mm -1 and the other 2500 mm -1. Measurements were made to provide absolute transmission efficiency at central