April 19, 2012
Author(s)
Andras Vladar, John S. Villarrubia, Michael T. Postek, Petr Cizmar
Our world is three-dimensional, so are the integrated circuits (ICs), they have always been. In the past, for a long time, weve been very fortunate, because it was enough to measure the critical dimension (CD), the width of the resist line to keep IC