June 17, 2013
Author(s)
Andrew Baker, Siew-Leng Tan, Richard Leach, Lena Jung, Seung Yin Wong, Anusorn Tonmueanwai, Kazuya Naoi, Jaewan Kim, Thomas Brian Renegar, K P Chaudhary, Louise Mostert, Mohamed Amer, Sitian Gao, Chin-Lung Tsai, Ngo N. Anh, Augustinus Drijarkara
Surface roughness calibration services of sixteen countries from four metrology regions are compared through measurements of roughness and step height standards. The artefacts circulated include three steps of nominal depths 0.4 μm, 2.4 μm and 10 μm