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Search Publications by: Patrick J. Abbott (Assoc)

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Displaying 26 - 48 of 48

Linking Air and Vacuum Mass Measurement by Magnetic Levitation

May 12, 2009
Author(s)
Zeina J. Kubarych, Patrick J. Abbott, Edwin R. Williams, Ruimin Liu, Vincent J. Lee, Hung-Kung Liu
This paper describes a new approach to directly link air and vacuum mass measurements using magnetic levitation techniques. This procedure provides direct traceability to national standards, presently defined in air, without requiring the estimate of

Quantitative Measurement of Outgas Products From EUV Photoresists

March 14, 2008
Author(s)
Charles S. Tarrio, Bruce A. Benner Jr, Robert E. Vest, Steven E. Grantham, Shannon B. Hill, Thomas B. Lucatorto, Jay H. Hendricks, Patrick J. Abbott, Greg Denbeaux, Alin Antohe, Chimaobi Mbanaso, Kevin Orbek
The photon-stimulated emission of organic molecules from the photoresist during exposure is a serious problem for extreme- ultraviolet lithography (EUVL) because the adsorption of the outgassing products on the EUV optics can lead to carbonization and

Magnetic Levitation System for the Dissemination of a Non-Artifact Based Kilogram

November 27, 2007
Author(s)
Zeina J. Kubarych, Patrick J. Abbott, Edwin R. Williams, Ruimin Liu, Vincent J. Lee
We describe a new approach to directly link air and vacuum mass measurements. This approach uses magnetic levitation along with vacuum and balance technology to realize vacuum mass measurements. It provides direct traceability to the International

Reproducibility of the Accommodation Coefficient of the Spinning Rotor Gauge

October 1, 2007
Author(s)
Ren F. Chang, Patrick J. Abbott
Eight spinning rotor gauges were calibrated numerous times simultaneously with the primary midrange vacuum standard at the National Institute of Standards and Technology, over a period of fifteen months to assess the reproducibility of their accommodation

Anomalous Behavior of Teflon-Based Helium Permeation Flow Standards

June 1, 2007
Author(s)
Patrick J. Abbott, Justin H. Chow
Helium leak testing is a vital step in assuring product reliability for anything that must be packaged in a sealed container. Examples abound from blister packaging for pharmaceuticals to aluminum wheel rims for automobiles. In order to quantify detected

The Calibration of Vacuum Gauges

March 1, 2006
Author(s)
Patrick J. Abbott
Vacuum gauges are used to measure pressures below the local atmospheric pressure. The success of many processes relies on an accurate vacuum pressure measurement, making calibration of vacuum gauges essential. This paper discusses the issues related to

Commercial helium permeation leak standards: Their properties and reliability

February 12, 1996
Author(s)
Patrick J. Abbott, S A. Tison
Standard leaks or leak artifacts are used extensively in industrial and research environments, typically for the calibration of helium leak detectors. The most commonly used leak is the helium permeation type, which uses a glass, quartz, or polymer barrier