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Search Publications by: Ping-Shine Shaw (Fed)

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Displaying 51 - 75 of 146

Damage to Solid-State Photodiodes by Vacuum Ultraviolet Radiation

June 1, 2005
Author(s)
Uwe Arp, Ping-Shine Shaw, R Gupta, Keith R. Lykke
We report experimental results on the stability of photodiodes obtained at three different wavelengths in the vacuum ultraviolet spectral region. Two of these experiments were based on radiation damage inflicted with excimer lasers at 193 nm and 157 nm and

Stability of Photodiodes Under Irradiation With 157-nm Pulsed Excimer Laser

January 1, 2005
Author(s)
Ping-Shine Shaw, R Gupta, Keith R. Lykke
We have measured the stability of a variety of photodiodes as they are irradiated with UV light from a pulsed excimer laser source operating at 157 nm using a radiometry beamline at the Synchrotron Ultraviolet Radiation Facility (SURF III) at the National

Improved Radiometry For Extreme-Ultraviolet Lithography

November 1, 2004
Author(s)
Charles S. Tarrio, Robert E. Vest, Steven E. Grantham, K Liu, Thomas B. Lucatorto, Ping-Shine Shaw
The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements are

40 Years of Metrology With Synchrotron Radiation at SURF

September 1, 2003
Author(s)
Uwe Arp, Steven E. Grantham, Simon G. Kaplan, Ping-Shine Shaw, Charles S. Tarrio, Robert E. Vest
the advantages of a compact synchrotron radiation source like the Synchrotron Ultraviolet Radiation Facility for metrology in the ultraviolet and extreme ultraviolet are shown. The capabilities of the different experimental stations are explained and

A SURF Beamline for Synchrotron Source-Based Absolute Radiometry

February 1, 2003
Author(s)
Ping-Shine Shaw, Uwe Arp, Howard W. Yoon, Robert D. Saunders, Albert C. Parr, Keith R. Lykke
A new source-based radiometry beamline at Synchrotron Ultraviolet Radiation Facility (SURF III) was constructed recently. The goal of this beamline is to establish a national source standard with wide spectral range from far UVto IR by using the