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Search Publications by: Ping-Shine Shaw (Fed)

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Displaying 26 - 50 of 73

Damage to Solid-State Photodiodes by Vacuum Ultraviolet Radiation

June 1, 2005
Author(s)
Uwe Arp, Ping-Shine Shaw, R Gupta, Keith R. Lykke
We report experimental results on the stability of photodiodes obtained at three different wavelengths in the vacuum ultraviolet spectral region. Two of these experiments were based on radiation damage inflicted with excimer lasers at 193 nm and 157 nm and

Stability of Photodiodes Under Irradiation With 157-nm Pulsed Excimer Laser

January 1, 2005
Author(s)
Ping-Shine Shaw, R Gupta, Keith R. Lykke
We have measured the stability of a variety of photodiodes as they are irradiated with UV light from a pulsed excimer laser source operating at 157 nm using a radiometry beamline at the Synchrotron Ultraviolet Radiation Facility (SURF III) at the National

Improved Radiometry For Extreme-Ultraviolet Lithography

November 1, 2004
Author(s)
Charles S. Tarrio, Robert E. Vest, Steven E. Grantham, K Liu, Thomas B. Lucatorto, Ping-Shine Shaw
The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements are

40 Years of Metrology With Synchrotron Radiation at SURF

September 1, 2003
Author(s)
Uwe Arp, Steven E. Grantham, Simon G. Kaplan, Ping-Shine Shaw, Charles S. Tarrio, Robert E. Vest
the advantages of a compact synchrotron radiation source like the Synchrotron Ultraviolet Radiation Facility for metrology in the ultraviolet and extreme ultraviolet are shown. The capabilities of the different experimental stations are explained and

A SURF Beamline for Synchrotron Source-Based Absolute Radiometry

February 1, 2003
Author(s)
Ping-Shine Shaw, Uwe Arp, Howard W. Yoon, Robert D. Saunders, Albert C. Parr, Keith R. Lykke
A new source-based radiometry beamline at Synchrotron Ultraviolet Radiation Facility (SURF III) was constructed recently. The goal of this beamline is to establish a national source standard with wide spectral range from far UVto IR by using the

Characterization of UV Detectors at SURF III (invited)

March 1, 2002
Author(s)
Ping-Shine Shaw, Thomas C. Larason, R Gupta, Keith R. Lykke
The Synchrotron Ultraviolet Radiation Facility (SURF III) at the National Institute of Standards and Technology provides a unique research opportunity in precision measurement with its continuous and calculable radiation stretching from the soft x-ray to

The New Beamline 3 at SURF III for Source-Based Radiometry

March 1, 2002
Author(s)
Ping-Shine Shaw, D A. Shear, R Stamilio, Uwe Arp, Howard W. Yoon, Robert D. Saunders, Albert C. Parr, Keith R. Lykke
The Synchrotron Ultraviolet RAdiation Facility (SURF III) at the National Institute of Standards and Technology provides a unique opportunity for high-accuracy UV to infrared radiometry due to the 70-fold improvement in the uniformity of the magnetic field

The New UV Radiometry Facility at SURF

March 1, 2002
Author(s)
Ping-Shine Shaw, Keith R. Lykke, R Gupta, Uwe Arp, Thomas B. Lucatorto, Albert C. Parr
The Synchrotron Ultraviolet Radiation Facility (SURF III) at the National Institute of Standards and Technology (NIST) provides a unique opportunity for high-accuracy VUV to visible radiometry with the completion of a recent upgrade to improve the

SURF III - An Improved Storage Ring for Radiometry

October 1, 2000
Author(s)
Uwe Arp, R Friedman, Mitchell L. Furst, Susan L. Makar, Ping-Shine Shaw
The National Institute of Standards and Technology (NIST) operates the newly upgraded Synchrotron Ultraviolet Radiation Facility (SURF III) mainly as a light source for radiometry. SURF III provides continuum radiation from the far infrared to the soft X

Improved Near-Infrared Spectral Responsivity Scale

September 1, 2000
Author(s)
Ping-Shine Shaw, Thomas C. Larason, R Gupta, Steven W. Brown, Keith R. Lykke
A cryogenic radiometer-based system was constructed at the National Institute of Standards and Technology (NIST) for absolute radiometric measurements to improve detector spectral responsivity scales in the wavelength range from 900 nm to 1800 nm. In

Characterization of Materials Using an Ultraviolet Radiometric Beamline at SURF III

January 1, 2000
Author(s)
Ping-Shine Shaw, R Gupta, Thomas A. Germer, Uwe Arp, Thomas B. Lucatorto, Keith R. Lykke
The completion of the upgrade of the synchrotron facilities at the National Institute of Standards and Technology (NIST) has yielded a better-characterization broadband source of ultraviolet (UV) radiation at the Synchrotron Ultraviolet Radiation Facility