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Search Publications by: Zachary H. Levine (Fed)

Displaying 201 - 225 of 296

Implications of Intrinsic Birefringence for 157 nm Lithography

January 1, 2002

Author(s)

J H. Burnett, Zachary H. Levine, Eric L. Shirley

Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography

January 1, 2002

Author(s)

J H. Burnett, Zachary H. Levine, Eric L. Shirley, Editors

Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography

January 1, 2002

Author(s)

John H. Burnett, Zachary H. Levine, E L. And shirley

Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography

January 1, 2002

Author(s)

J H. Burnett, Zachary H. Levine, Eric L. Shirley

Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography

January 1, 2002

Author(s)

John H. Burnett, Zachary H. Levine, E L. And shirley

Mass absorption coefficient of tungsten for 1600-2100 eV

January 1, 2002

Author(s)

Zachary H. Levine, Steven E. Grantham, I McNulty

Mass Absorption Coefficient of Tungsten, 1606-2100 eV

January 1, 2002

Author(s)

Zachary H. Levine, S Grantham, I McNulty

The transmission of soft x-rays with photon energies from 1606 eV to 2106 eV was measured for tungsten using thin film samples and a synchrotron source. This region includes the M IV and M V edges. The two tungsten films had thicknesses of 107.7 10 nm and