Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Publications by: Erik M. Secula (Fed)

Displaying 26 - 42 of 42

Round Robin for Standardization of MEMS Length and Strain Measurements

July 12, 2004

Author(s)

Janet M. Cassard, Erik M. Secula, J Huang

A microelectromechanical systems (MEMS) Length and Strain Round Robin is underway to compare results of in-plane length measurements, residual strain measurements, and strain gradient measurements at a number of laboratories. The goal of this round robin

Characterization and Metrology for ULSI Technology: 2003

September 30, 2003

Author(s)

David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, Robert McDonald, Stefan Zollner, Rajinder P. Khosla, Erik M. Secula

Semiconductor Electronics Division

September 30, 2003

Author(s)

David G. Seiler, Erik M. Secula

This is a high-level, full-color brochure detailing the activities and challenges of the Semiconductor Electronics Division. Topics include Division history, nanotechnology, MEMS, electrical test structures, power electronics, optical and electrical

Semiconductor Electronics Division Programs, Activities, and Accomplishments 2002

February 11, 2003

Author(s)

Erik M. Secula

This document represents the fiscal year 2002 production of the projects comprising the Semiconductor Electronics Division. Project goals, customer needs, technical strategies, accomplishments, and deliverables are all presented. Division-wide highlights

Semiconductor Electronics Division Programs, Acitivites, and Accomplishments 2001

January 21, 2002

Author(s)

Erik M. Secula

This document represents the fiscal year 2000 production of the Projects comprising the Semiconductor Electronics Division (SED). Project goals, customer needs, technical strategies, accomplishments, and deliverables are all presented. Division-wide

Characterization and Metrology for ULSI Technology: 2000

February 1, 2001

Author(s)

David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, R. C. McDonald, W M. Bullis, P. J. Smith, Erik M. Secula

Semiconductor Electronics Division Programs, Activities, and Accomplishments 2000

January 1, 2001

Author(s)

Erik M. Secula

Semiconductor Electronics Division: Programs, Activities, and Accomplishments

January 1, 2000

Author(s)

Erik M. Secula

This document represents the fiscal year 1999 production of the Projects comprising the Semiconductor Electronics Division (SED). Project goals, customer needs, technical strategies, accomplishments, and deliverables are all presented. Division-wide

An Evaluation of Instrumental Correction Factors for Infrared Absorption Concentration Measurements,

December 31, 1989

Author(s)

D. Baghdadi, Erik M. Secula