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Search Publications by: Hae-Jeong Lee (Fed)

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Displaying 1 - 25 of 39

Low Dielectric Constant Nanocomposite Thin Films Based on Silica Nanoparticle and Organic Thermosets

October 12, 2021
Author(s)
Q Lin, Stephen Cohen, Lynne Gignac, Brian Herbst, David Klaus, Eva Simonyi, Jeffrey Hedrick, John Warlaumont, Hae-Jeong Lee, Wen-Li Wu
Low dielectric constant (low-k) nanocomposite thin films have been prepared by spin coating and thermal cure of solution mixtures of two organic low-k thermoset pre-polymers and a silica nanoparticle with an average diameter of about 8nm. The electrical

Organosilicate Polymer E-Beam Resists with High Resolution, Sensitivity and Stability

February 28, 2013
Author(s)
Christopher Soles, Richard Kasica, Hae-Jeong Lee, Jae H. Sim, Sung-Il Lee, Ki-Bum Kim, Hyun-Mi Kim, Do Y. Yoon
Hydrogen silsesquioxane (HSQ) is an attractive electron-beam (e-beam) resist for sub-20 nm lithography due to its high resolution, excellent line-edge-roughness (LER), and good plasma etch resistance. However, the sensitivity and long-term stability of HSQ

The Effects of Folding on High Strength Fibers Used in Soft Body Armor

January 23, 2012
Author(s)
Haruki Kobayashi, Walter G. McDonough, Joy Dunkers, Jae H. Kim, Hae-Jeong Lee, Scott Wight, Amanda L. Forster, Kirk D. Rice, Gale A. Holmes
Poly (p-phenylene benzobisoxazole) (PBO) fibers have been used in soft body armor (SBA) because of their high mechanical strength. However, there was an unexpected failure of a first responder's SBA which was composed of PBO fiber that was in service for

The Effect of Folding on the Mechanical Properties and Internal Structures of Fibers Used in Ballistic Applications

July 18, 2011
Author(s)
Haruki Kobayashi, Walter G. McDonough, Hae-Jeong Lee, Jae H. Kim, Amanda L. Forster, Kirk D. Rice, Gale A. Holmes
The failure of a first responder's soft body armor (SBA) composed of poly (p-phenylene benzobisoxazole) (PBO) fibers has prompted researchers to assess the long-term durability and effectiveness of current and future SBA products. Based on existing data

The Effect of Folding on the Internal Structure of Ballistic Fibers

May 26, 2011
Author(s)
Haruki Kobayashi, Walter G. McDonough, Hae-Jeong Lee, Jae H. Kim, Amanda L. Forster, Kirk D. Rice, Gale A. Holmes
In one of our previous studies, the mechanical properties of poly (p-phenylene benzobisoxazole) (PBO) fibers were degraded when the fibers were folded. When we examined poly (p-phenylene terephthalamide) (PPTA) fibers, we did not find a similar drop in

Differences in Polydimethylsiloxane Modification Methods Affect Laminin Deposition and Smooth Muscle Cell Proliferation

April 13, 2011
Author(s)
Joy P. Dunkers, Hae-Jeong Lee, Marvi Matos, Lisa Pakstis, Juan M. Taboas, Steven D. Hudson, Marcus T. Cicerone
When culturing cells on flexible surfaces, it is important to consider extracellular matrix treatments that will remain on the surface under mechanical strain. Here we investigate differences in laminin surfaces that were deposited on oxidized PDMS (plasma

Differences in PDMS Modification Affect Laminin Deposition and Smooth Muscle Cell Response

August 16, 2009
Author(s)
Joy P. Dunkers, Hae-Jeong Lee, Marvi Matos, Lisa Pakstis, Juan M. Taboas, Steven D. Hudson, Marcus T. Cicerone
When culturing cells on flexible surfaces, it is important to consider extracellular matrix treatments that will remain on the surface under mechanical strain. Here we investigate differences in laminin surfaces that were deposited on oxidized PDMS (plasma

Characterization of Nanoporous Low-K Thin Films by SANS Contrast Variation

October 16, 2008
Author(s)
R C. Hedden, Hae-Jeong Lee, Barry J. Bauer
Small-angle neutron scattering (SANS) contrast variation is applied to characterization of nanoporous low-dielectric constant (low-k) thin films. Films are exposed to saturated solvent vapor in air, whereby the pores fill with liquid by capillary

Investigation of N 2 Plasma Effects on the Depth Profile of Hydrogen Silsesquioxane Thin Films Using High Resolution Specular X-Ray Reflectivity

October 16, 2008
Author(s)
Hae-Jeong Lee, Eric K. Lin, J K. Lan, Y L. Cheng, H C. Liou, Wen-Li Wu, Y L. Wang, M S. Feng, C G. Chao
Non-destructive, specular X-ray reflectivity (SXR) measurements were used to investigate N2 plasma effects on the density depth profile of hydrogen silsesquioxane (HSQ) thin films. The SXR data indicate that the density profile of an HSQ film without

Characterization of Laminin on Silanized Polydimethylsiloxane

August 21, 2008
Author(s)
Joy P. Dunkers, Lisa M. Hughes, Hae-Jeong Lee, Marvi Matos, Marcus T. Cicerone
In this work, we characterize a protein surface on a flexible polydimethylsiloxane substrate (PDMS) capable of undergoing strain. We compare the results from two different surface treatments: physically adsorbed laminin on PDMS and laminin deposited on

Self-Sealing Nanoporous Low-k Dielectric Patterns Created by Nanoimprint Lithography

April 15, 2008
Author(s)
Hyun Wook Ro, H Peng, Ken-ich Nihara, Hae-Jeong Lee, Eric K. Lin, Alamgir Karim, D Gidley, Hiropshi Jinai, Do Y. Yoon, Christopher L. Soles
In this letter we describe how highly porous nanostructures can be directly printed into a poly(methylsilsequioxane) (PMSQ)-based organosilicate film, with high pattern fidelity, and develop the measurement infrastructure to quantitatively evaluate the

Characterizing Pattern Structures Using X-Ray Reflectivity

March 28, 2008
Author(s)
Hae-Jeong Lee, Christopher L. Soles, Hyun Wook Ro, Shuhui Kang, Eric K. Lin, Alamgir Karim, Wen-Li Wu
Specular X-ray reflectivity (SXR) can be used, in the limit of the effective medium approximation (EMA), as a high-resolution shape metrology for periodic patterns on a planar substrate. The EMA means that the density of the solid pattern and the space

The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography

October 2, 2007
Author(s)
Hyun Wook Ro, Ronald L. Jones, H Peng, Daniel R. Hines, Hae-Jeong Lee, Eric K. Lin, Alamgir Karim, Do Y. Yoon, D Gidley, Christopher L. Soles
Directly patterning dielectric insulator materials via nanoimprint lithography has the potential to simplify fabrication processes and significantly reduce the manufacturing costs for semiconductor devices. However, the prospect of mechanically forming

Mechanically Robust Spin-On Organosilicates Glasses for Nanoporous Applications

February 7, 2007
Author(s)
Hyun Wook Ro, K Char, Eun-Chae Jeon, H C. Kim, Dongil Kwon, Hae-Jeong Lee, J. H. Lee, Hee-Woo Rhee, Christopher L. Soles, Do Y. Yoon
An increasing number of technologies demand nanoporous materials with vastly improved physical, mechanical and thermal properties. This manuscript develops the microstructural basis for synthesizing organosilicate glasses (OSGs) with unprecedented thermal

Evidence for Internal Stresses Induced by Nanoimprint Lithography

November 30, 2006
Author(s)
Hyun Wook Ro, Yifu Ding, Hae-Jeong Lee, Daniel R. Hines, Ronald L. Jones, Eric K. Lin, Alamgir Karim, Wen-Li Wu, Christopher L. Soles
The thermal embossing form of nanoimprint lithography is used to pattern arrays of nanostructures into several different polymer films. The shape of the imprinted patterns is characterized with nm precision using both X-ray scattering and reflectivity

Structural Characteristics of Methylsilsesquioxane Based Porous Low-k Thin Films Fabricated with Increasing Cross-Linked Particle Porogen Loading

September 1, 2006
Author(s)
Hae-Jeong Lee, Christopher L. Soles, Da-Wei Liu, Barry J. Bauer, Eric K. Lin, Wen-Li Wu
Methylsilsesquioxane (MSQ) based porous low-k dielectric films with different porogen loading have been characterized using X-ray porosimetry (XRP) to determine their pore size distribution, average density, wall density and porosity. By varying the