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Search Publications by: Heather J. Patrick (Fed)

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Displaying 1 - 25 of 50

Ultraviolet to Short-Wave Infrared Spectral Reflectance

October 28, 2024
Author(s)
Heather Patrick, Clarence Zarobila
The National Institute of Standards and Technology performs calibrations of spectral reflectance measurements in the ultraviolet (UV) to short-wave infrared (SWIR) spectral regions using the Robotic Optical Scattering Instrument (ROSI) and its associated

Uncertainty in global downwelling plane irradiance estimates from sintered polytetra fluoroethylene plaque radiance measurements

May 20, 2019
Author(s)
Alexandre Castagna, B. Carol Johnson, Kenneth Voss, Heidi M. Dierssen, Heather Patrick, Thomas Germer, Zhehai Shang
Global downwelling plane irradiance is a necessary variable to normalize the water-leaving radiance measurements, reducing the magnitude and spectral variabilities introduced by the incident light field. As a result, the normalized measurements, known as

A Traceable Scatterometry Measurement of a Silicon Line Grating

May 26, 2011
Author(s)
Thomas A. Germer, Heather J. Patrick, Ronald G. Dixson
In this paper, we present a spectroscopic Mueller matrix ellipsometry measurement of a silicon line grating with nominal pitch of 600 nm and line width 100 nm. An uncertainty analysis is performed on the measurement results. The results are compared to

Supercontinuum fiber laser source for reflectance calibrations in remote sensing

August 1, 2010
Author(s)
Clarence J. Zarobila, Heather J. Patrick
The Optical Technology Division of the NIST provides reference measurements of specular and diffuse reflectance of materials, including measurements that provide traceability for diffuser plaques that are used as onboard calibration standards in remote

Effect of Bandwidth and Numerical Aperture in Optical Scatterometry

March 1, 2010
Author(s)
Thomas A. Germer, Heather J. Patrick
We consider the effects of finite spectral bandwidth and numerical aperture in scatterometry measurements and discuss efficient integration methods based upon Gaussian quadrature in one dimension (for spectral bandwidth averaging) and two dimensions inside

Developing an Uncertainty Analysis for Optical Scatterometry

August 3, 2009
Author(s)
Thomas A. Germer, Heather J. Patrick, Richard M. Silver, Benjamin Bunday
This article describes how an uncertainty analysis may be performed on a scatterometry measurement. A method is outlined for propagating uncertainties through a least-squares regression. The method includes the propagation of the measurement noise as well