November 18, 2011
Author(s)
S. H. Baek, J. Park, D. M. Kim, Vladimir Aksyuk, R. R. Das, S. D. Bu, D. A. Felker, J. Lettieri, V Vaithyanathan, S. Bharadwaja, N. Bassiri-Gharb, Y. B. Chen, H. P. Sun, C. M. Folkman, H. W. Jang, D. J. Kreft, S K. Streiffer, R. Ramesh, X Q. Pan, S Trolier-McKinstry, Darrell G. Schlom, M. S. Rzchowski, R. Blick, C. B. Eom
Smart materials that can sense, manipulate, and position are crucial to the functionality of micro- and nano-machines [1-2]. Integration of single crystal piezoelectric films on silicon offers the opportunity of high performance piezoelectric