January 21, 2007
Author(s)
E. J. Eklund, A Shkel, Svenja A. Knappe, Elizabeth A. Donley, John E. Kitching
This paper presents an application of micro glass blowing, in which multiple glass spheres are simultaneously shaped on top of a silicon wafer and subsequently filled with rubidium. The fabrication process is based on etching cavities in silicon, followed