Zou, H.
(1999),
Self-Calibration and Error Compensation Using Reference Position Markers, Measurement Science Conference, Anaheim, CA
(Accessed February 10, 2025)
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Self-Calibration and Error Compensation Using Reference Position Markers
Published
Author(s)
Abstract
In this paper, reference position markers are proposed for self-calibration and error compensation. Self-calibration of x-y motion guides is discussed with a focus on the orthogonality calibration. An algorithm is developed using a closure method and reference position markers. The calibration uncertainty is estimated. Self-calibration of Abbe error is discussed: two sets of measurements made at different Abbe offsets combined with the use of reference position markers are proposed to develop an error map for Abbe error compensation. The limitation of pre-processed error compensation is also discussed.Proceedings Title
Measurement Science Conference
Conference Dates
January 20-21, 1999
Conference Location
Anaheim, CA
Conference Title
Measurements Science Conference
Pub Type
Conferences
Keywords
Abbe error, error compensation, orthogonality, pre-process, reference position markers, self-calibration
Citation
Issues
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Created January 1, 1999, Updated February 19, 2017