Albers, J.
and Berkowitz, H.
(1993),
Semiconductor Measurement Technology: A Collection of Computer Programs for Two-Probe Resistance (Spreading Resistance) and Four-Probe Resistance Calculations: RESPAC, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed July 21, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Semiconductor Measurement Technology: A Collection of Computer Programs for Two-Probe Resistance (Spreading Resistance) and Four-Probe Resistance Calculations: RESPAC
Published
Author(s)
, H. L. Berkowitz
Citation
Special Publication (NIST SP) -
Volume
400
Issue
91
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created May 31, 1993, Updated October 12, 2021