Ritchie, N.
(2001),
Strategies for Standardizing EDS Measurements, Microscopy and Microanalysis, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934207
(Accessed October 31, 2024)
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Strategies for Standardizing EDS Measurements
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Abstract
Energy dispersive X-ray spectrometers (EDS) are capable of precise and accurate electron beam measurements of composition. However, the optimal strategies for acquiring EDS standards differ from its wavelength dispersive cousin. There is a lot more information in an EDS spectrum that can be used to evaluate its quality. This information can be used to perform inter-comparisons between multiple spectra collected from the same material.Citation
Microscopy and Microanalysis
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Journals
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Keywords
EDS, Energy Dispersive X-ray Spectrometry, Standardization
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Created January 1, 2001, Updated November 29, 2022