Postek, M.
and Larrabee, R.
(2001),
Submicrometer Linewidth Metrology, Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed July 24, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Submicrometer Linewidth Metrology
Published
Author(s)
,
Citation
Technical Note (NIST TN) - 958
Report Number
958
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 2000, Updated October 12, 2021