Benck, E.
, Golubiatnikov, G.
, Fraser, G.
, Ji, B.
, Motika, S.
and Karwacki, E.
(2003),
Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing, Journal of Vacuum Science and Technology B
(Accessed December 26, 2024)
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Submillimeter-Wavelength Plasma Chemical Diagnostics for Semiconductor Manufacturing
Published
Author(s)
, G Y. Golubiatnikov, , B Ji, S A. Motika, E J. Karwacki
Citation
Journal of Vacuum Science and Technology B
Volume
21
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2003, Updated February 17, 2017