U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Transmission Near-Field Scanning Microscope for Infrared Chemical Imaging

Published

Author(s)

B Dragnea, J Preusser, W Schade, S R. Leone, W D. Hinsberg

Abstract

We report transmission infrared near-field scanning microscopy (IR-NSOM) imaging of chemically amplified photoresist polymers patterned by ultraviolet exposure. Chemical specificity was attained using infrared wavelengths tuned to the 3 m OH stretch absorption band of the polymer, a band sensitive to the chemical changes characteristic of the lithographic photochemical process of this material. Contrast mechanisms are discussed togetehr with the IR-NSOM specifics, such as the fabrication of an infrared near-field probe with high throughput, which lead to an attainable resolution of λ/10 and a transmission sensitivity of 1%.
Citation
Journal of Applied Physics
Volume
86
Issue
No. 5
Pub Type
Journals

Keywords

infrared, near-field, optical microscopy, photoresist polymers

Citation

Dragnea, B. , Preusser, J. , Schade, W. , Leone, S. and Hinsberg, W. (1999), Transmission Near-Field Scanning Microscope for Infrared Chemical Imaging, Journal of Applied Physics (Accessed December 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 31, 1999, Updated October 12, 2021