Windt, D.
, Waskiewicz, W.
, Kubiak, G.
and Barbee, T.
(1991),
XUV Characterization Comparison of Mo/Si Multilayer Coating,, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, San Diego, CA, USA
(Accessed July 27, 2024)
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XUV Characterization Comparison of Mo/Si Multilayer Coating,
Published
Author(s)
D L. Windt, W K. Waskiewicz, G D. Kubiak, T W. Barbee, Jr,
Proceedings Title
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography
Conference Dates
July 9, 1990
Conference Location
San Diego, CA, USA
Conference Title
Proc. of SPIE 1343
Pub Type
Conferences
Citation
Issues
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Created December 31, 1990, Updated October 12, 2021