Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Energy Use in the Semiconductor Industry
Understanding the Role of Energy in Semiconductor Manufacturing
Semiconductor manufacturing facilities require substantial amounts of energy to operate. The energy consumption varies based on the size of the fab and its energy efficiencies. Key energy-consuming processes and equipment include:
- Lithography, Etching, and Deposition: These are some of the most energy-intensive steps in the semiconductor manufacturing process.
- Vacuum Pumps and Local Exhaust Abatement Devices: Essential for maintaining cleanroom environments and reducing contaminations.
- Nitrogen Generation: Used to protect wafers from moisture and oxygen, generation of nitrogen gas requires significant energy for production and purification.
- Cleanrooms: These areas require continuous energy for recirculation airflow, temperature, and humidity control to meet contamination control standards.
Energy Use in Semiconductor Production
Implementing energy-efficient equipment and practices can significantly reduce a facility’s energy use. Methods for emissions reductions may include:
Reduction to direct emissions/gas abatement;
Reduction in operations energy consumption;
Optimization of energy supply for renewables;
Sourcing alternative materials and consumables with lower greenhouse gasses; and
Change of energy efficiency for downstream products and systems.
Learn More
