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HighRI Optics, Inc
Key Facts
Purpose
HighRI Optics, Inc will develop cutting-edge technology for instrument transfer function (ITF) calibration of extreme ultraviolet (EUV) lithographic tools to enhance the performance and precision of EUV tools utilized in semiconductor manufacturing.
Activities to be performed
The awardee with develop cutting-edge technology for instrument transfer function (ITF) calibration of extreme ultraviolet (EUV) lithographic tools.
Expected Outcomes
The proposed technology will enhance the performance and precision of extreme ultraviolet equipment.
Intended Beneficiaries
Researchers and U.S. semiconductor industry that utilizes extreme ultraviolet (EUV) lithographic tools.
Subrecipient Activities
The recipient plans to subaward funds to support fabrication and characterization of x-ray optical devices and EUV lithography and photomask development, along with technical consulting services.
Related Links
Read the full CHIPS for America press release by clicking here.