Octave Photonics seeks to develop a new measurement tool for critical metrology in the semiconductor fabrication that can analyze airborne contaminants and toxic gases inside and outside the fab that lead to semiconductor processing defects and safety infringements.
The awardee will design a photonic integrated circuit, measure baseline performance, and integrate their module within a commercial sensing system.
The infrared spectrometer system, integrated into a larger commercial instrument, will improve wafer yields, improve chip performance, and ensure long-term environmental sustainability for fabs.
U.S. fabrication facilities.
The recipient plans to subaward funds to integrate their new system within the subrecipient's commercial instrument.
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