PrimeNano Inc will develop a measurement technology for in-line metrology, which has applications in materials purity, electrical properties, 3D device and next generation manufacturing.
The awardee will research, develop and create an advanced prototype of their measurement technology for in-line metrology.
The measurement technology will allow for direct, non-destructive wafer-based measurements of electrical material properties.
Researchers and U.S. semiconductor industry involved in metrology and advanced packaging.
The recipient plans to subaward funds for software integration and process development for modified probes.
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