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PrimeNano Inc.
Key Facts
Purpose
PrimeNano Inc will develop a measurement technology for in-line metrology, which has applications in materials purity, electrical properties, 3D device and next generation manufacturing.
Activities to be performed
The awardee will research, develop and create an advanced prototype of their measurement technology for in-line metrology.
Expected Outcomes
The measurement technology will allow for direct, non-destructive wafer-based measurements of electrical material properties.
Intended Beneficiaries
Researchers and U.S. semiconductor industry involved in metrology and advanced packaging.
Subrecipient Activities
The recipient plans to subaward funds for software integration and process development for modified probes.
Related Links
Read the full CHIPS for America press release by clicking here.