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Physical Measurement Laboratory

Microsystems and Nanotechnology Division

Projects/Programs

Displaying 1 - 25 of 49
Diagram of In-Situ AFM During Resist Development

Advanced Metrology to Enable Next Generation EUV Photoresists

Ongoing
EUV (extreme ultraviolet) lithography, the technology that “saved Moore’s Law,” is widely regarded as the future of cutting-edge nanofabrication. It was developed in the United States and U.S. companies in many parts of the EUV ecosystem have established dominance in the field that must be defended
atomic-force microscopy illustration

Atomic-force microscopy

Ongoing
Atomic-force microscopy enables subnanometer imaging resolution, to extract geometric parameters of reference structures that advance measurement science, and to quantify the accuracy of device design and fabrication for stakeholders. We are advancing two primary atomic-force microscopy systems
Microfluidic tissue/organ on a chip system

Bioelectronic Sensors for Tissue/Organ-on-a-Chip Systems

Ongoing
We apply our expertise in micro/nanofabrication, electrokinetics and cell-based assays to develop bioelectronic sensors in microfluidic platforms. We are working on a platform that entraps cells for electrochemical monitoring in an environment that has mechanical properties more similar to those
biomolecule

Biomolecular assembly

Ongoing
The integration of new materials or components into the design and production of diverse nanotechnologies, ranging from electronic devices to therapeutic particles, requires a quantitative understanding of process–structure–property relationships, as well as interactions with other entities in the
simulated 3d SEM images of a 60nm gold nanoparticle

Computational Scanning Electron Microscopy

Ongoing
In many cases, SEM measurements are carried out without knowledge of the best measurement conditions, partly due to engineering limits of the SEM, but also due to lack of thorough knowledge of the physics of the signal generation. For example, in many cases the best-quality results can be obtained
SEM measurement of PS-PMMA lamellae on a neutral substrate

Directed Self-Assembly of Block Copolymers (Archived)

Completed
Diblock copolymers are long molecular chain polymers with two (di) regions, or blocks, of dissimilar monomers. They are constructed by covalently linking two different polymer chains at their ends. The two regions can be chosen so that they repel each other. Normally mixtures of different polymers
Schematic showing DNA origami in a laser beam

DNA Origami for Precise Manufacturing of Nanoscale Structures

Completed
The base pairing of adenine to thymine and guanine to cytosine to form DNA provides a robust molecular recognition scheme that can be used to create a wide variety of well-ordered nanostructures. DNA origami, which uses a long scaffold strand folded together by specific sets of short staple strands
Optofluidic device

Dynamic Nanoflow Metrology

Ongoing
Ultra-precise and dynamic flow measurements are needed for high-throughput biological studies and for dynamic control of chemical delivery systems in medical and biotechnology applications. In addition, existing analytical methods, such as analytical high-performance liquid chromatography (HPLC) and

Efficient Optical Spectroscopy of Single Solid-State Quantum Emitters

Ongoing
For emitters embedded in semiconductors, such as a quantum dot in GaAs, the fluorescence collection efficiency is limited by the large refractive index contrast between the semiconductor in comparison to the surrounding air. This causes most of the light emission to remain trapped in the
surface acoustic wave sensor

Electroacoustic Wave-Based Flow Sensors

Ongoing
As part of our NIST-on-a-Chip efforts, we are developing strategies to measure local flow in microfluidic systems. This project will develop label-free flow sensors using surface acoustic waves embedded in microfluidic devices. In this approach, an electromechanical transducer is placed on a
Electron-beam lithography

Electron-beam lithography

Ongoing
Electron-beam lithography allows fine control of nanostructure features that form the basis of diverse device technologies. Lateral resolution of 10 nm, placement accuracy of 1 nm, and patterning fields of 1 mm are all possible. However, achieving these performance metrics depends on many
modular measurement platform

Electronic Biophysical Measurements

Ongoing
We develop measurements that leverage electronic signal transduction using FETs to maximize sensitivity and improve the resolution of biomolecular measurements. The techniques allow direct charge transduction during molecular interactions to quantify fundamental biophysical processes. Critically the
Blue rectangle with green line through it. Electron Solid Interaction Illustration.

Electron-Solid Interactions

Ongoing
A measuring instrument produces a signal that depends upon the value of the measurand. The value and its uncertainty are inferred from the signal by using a model of their relationship. Erroneous models lead to erroneous inference. The accuracy of SEM (scanning electron microscopy) is limited by
A high-finesse Fabry-Perot interferometer

Fabry-Perot Displacement Interferometry

Ongoing
Fabry-Perot interferometry has the highest resolution of any displacement sensor, below one picometer, and yet may be used to measure displacements of many centimeters. Equally important, it enables a natural and direct link to the SI unit of length, defined in terms of the speed of light. We are

Fluctuations and Nanoscale Control (Archived)

Completed
In liquids, the motion of a nanoparticle results from a complex interplay of fluid flow, external and internal dynamics, and random Brownian motion. Each of these processes leads to fluctuations in a measured signal. Normally it is an important (and difficult) task for the experimenter is to

Fluctuations and Nanoscale Control Software (Archived)

Completed
For each file YYY.m, type "doc YYY" from the Matlab command prompt for documentation, literature references, and usage guidelines. DSigma2_Est.m Estimates the diffusion coefficient (D) and localization noise (σ 2 or "Sigma2") from single-particle tracking data. It implements the algorithms for the
Focused-ion-beam machining images

Focused-ion-beam machining

Ongoing
Structure determines function in diverse nanotechnologies, so that making devices to control or measure nanoscale phenomena begins with control of nanoscale structure. Few fabrication systems outperform the focused ion beam to pattern nanostructures by directing ions of various elements to an
single_photon_QFT_schematic

Frequency Conversion Interfaces for Photonic Quantum Systems

Ongoing
Our research on quantum frequency conversion follows two main tracks. First, we combine relatively mature frequency conversion technology based on periodically-poled lithium niobate waveguides with quantum light generated by single semiconductor quantum dots in proof-of-principle experiments that
eight boxes with different graphs

Mapping of Thermal Properties at the Nanoscale

Ongoing
Continuous advances in the performance and functionality of semiconductor devices have been driven by scale reduction, incorporation of new and nanomaterials, and by heterogeneous integration (HI). However, such scaling and integrated architecture has rendered existing thermal metrology inadequate

Measuring Light-Matter Interactions in Chip-Based Optical Cavities

Ongoing
A "single emitter" is a structure that exhibits a transition from a high energy state to a low energy state, thereby generating a photon, or light emission. A variety of solid-state single emitters have been discovered or manufactured. One example is a quantum dot, a nanometer-scale structure that