Varner, R.
and Vezzetti, C.
(1992),
Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems/, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-117
(Accessed July 27, 2024)
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Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems/
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- NIST SP 260-117
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NIST SP 260-117
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NIST Pubs
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Created January 1, 1992, Updated May 20, 2023