U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Nanomanufacturing of atom-based dimensional standards ::a final project report of the national advanced manufacturing testbed

Published

Author(s)

T V Vorburger, R H Allen, B Damazo, J Fu, D Monk, M Osti, J Pellegrino, R Rhorer, R Russell, R Silver, R Sriram, K Stouffer, D A Swyt, E C Teague, T Wheatley, D Wilmering
Citation
- NIST IR 6850
Report Number
NIST IR 6850
Pub Type
NIST Pubs

Download Paper

DOI Link

Citation

Vorburger, T. , Allen, R. , Damazo, B. , Fu, J. , Monk, D. , Osti, M. , Pellegrino, J. , Rhorer, R. , Russell, R. , Silver, R. , Sriram, R. , Stouffer, K. , Swyt, D. , Teague, E. , Wheatley, T. and Wilmering, D. (2002), Nanomanufacturing of atom-based dimensional standards ::a final project report of the national advanced manufacturing testbed, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6850 (Accessed March 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2002, Updated February 19, 2025