Finish and Figure Metrology for Soft X­ray Optics

Theodore V. Vorburger; Christopher J. Evans; V W. Tsai; Joseph Fu; E. C. Williams; Ronald G. Dixson; P Sullivan; T. McWaid

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PUBLICATIONS

Finish and Figure Metrology for Soft Xray Optics

Published

January 1, 1997

Author(s)

Theodore V. Vorburger, Christopher J. Evans, V W. Tsai, Joseph Fu, E. C. Williams, Ronald G. Dixson, P Sullivan, T. McWaid

Abstract

Abstract not available.

Proceedings Title

Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors

Conference Dates

January 1, 1997

Conference Location

Tokyo

Pub Type

Conferences

Manufacturing and Metrology

Citation

Vorburger, T. , Evans, C. , Tsai, V. , Fu, J. , , E. , Dixson, R. , Sullivan, P. and McWaid, T. (1997), Finish and Figure Metrology for Soft Xray Optics, Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, -1 (Accessed January 3, 2025)

Issues

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Created January 1, 1997, Updated February 19, 2017