Germer, T.
, Seiler, D.
, Bullis, W.
, Diebold, A.
, Mcdonald, R.
and Shaffner, T.
(1998),
Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection, Characterization and Metrology for ULSI Technology
(Accessed July 18, 2024)
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Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection
Published
Author(s)
, D G. Seiler, W M. Bullis, A C. Diebold, R Mcdonald, T J. Shaffner
Citation
Characterization and Metrology for ULSI Technology
Volume
449
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 1998, Updated February 17, 2017