Germer, T.
(2001),
Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula, Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, WA
(Accessed July 18, 2024)
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Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula
Published
Author(s)
Proceedings Title
Characterization and Metrology for ULSI Technology: 2000 International Conference
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, WA
Conference Title
Proc. AIP 550
Pub Type
Conferences
Citation
Issues
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Created January 1, 2001, Updated February 17, 2017