Mayo, S.
and Schafft, H.
(1995),
Electrical Characterization of Integrated Circuit Metal Line Thickness, Solid-State Electronics
(Accessed July 27, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Electrical Characterization of Integrated Circuit Metal Line Thickness
Published
Author(s)
,
Citation
Solid-State Electronics
Volume
38
Issue
12
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1995, Updated October 12, 2021