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Defect Formation in Semiconductor Layers During Epitaxial Growth

Published

Author(s)

B. Steiner, W. F. Tseng, J. Comas, U. Laor, R. G. Dobbyn
Citation
Journal of Crystal Growth
Volume
128

Citation

Steiner, B. , Tseng, W. , Comas, J. , Laor, U. and Dobbyn, R. (1993), Defect Formation in Semiconductor Layers During Epitaxial Growth, Journal of Crystal Growth (Accessed November 8, 2024)

Issues

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Created July 31, 1993, Updated October 12, 2021