Cresswell, M.
, Gaitan, M.
, Allen, R.
and Linholm, L.
(1991),
A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances, Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA
(Accessed July 1, 2024)
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A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances
Published
Author(s)
, , ,
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
4
Conference Dates
March 18-20, 1991
Conference Location
Kyoto, 1, JA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1991, Updated October 12, 2021