DeSalvo, G.
, Tseng, W.
and Comas, J.
(1992),
Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs, A1<sub> 0.3</sub>Ga<sub> 0.7</sub>As, In<sub> 0.2</sub>Ga<sub> 0.8</sub>As, in<sub> 0.53</sub>Ga<sub> 0.47</sub>As, In<sub> 0.52</sub>A1<sub> 0.48</sub>As, and InP, Journal of the Electrochemical Society
(Accessed July 27, 2024)
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Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs, A1 0.3Ga 0.7As, In 0.2Ga 0.8As, in 0.53Ga 0.47As, In 0.52A1 0.48As, and InP
Published
Author(s)
G. C. DeSalvo, W. F. Tseng, J. Comas
Citation
Journal of the Electrochemical Society
Volume
139
Issue
3
Pub Type
Journals
Citation
Issues
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Created February 29, 1992, Updated October 12, 2021