Lin, Y.
, Puthenkovilakam, R.
, Chang, J.
, Bouldin, C.
, Levin, I.
, Nguyen, N.
, Ehrstein, J.
, Sun, Y.
, Pianetta, P.
, Conard, T.
, Vandervorst, W.
, Venturo, V.
and Selbrede, S.
(2003),
Interfacial Properties of ZrO<sub>2</sub> on Silicon, Journal of Applied Physics
(Accessed July 1, 2024)
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Interfacial Properties of ZrO2 on Silicon
Published
Author(s)
Y S. Lin, R Puthenkovilakam, J Chang, , , , , Ying Sun, P Pianetta, T Conard, Wilfried Vandervorst, V Venturo, S Selbrede
Citation
Journal of Applied Physics
Volume
93
Issue
10
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created May 14, 2003, Updated October 12, 2021