Goodman, R.
, Materer, N.
and Leone, S.
(1997),
Ar, N2, Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking, Journal of Vacuum Science and Technology B
(Accessed November 8, 2024)
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Ar, N2, Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking
Published
Author(s)
R S. Goodman, N Materer,
Citation
Journal of Vacuum Science and Technology B
Volume
15
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1996, Updated October 12, 2021