Vartanian, V.
, McClure, P.
, Mancevski, V.
, Kopanski, J.
, Rack, P.
, Sitnitsky, I.
, Bresin, M.
, LaBella, V.
and Dunn, K.
(2010),
Carbon nanotube applications to scanning probe microscopy for next generation semiconductor metrology
(Accessed December 26, 2024)
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Carbon nanotube applications to scanning probe microscopy for next generation semiconductor metrology
Published
Author(s)
Victor H. Vartanian, Paul McClure, Vladimir Mancevski, , Phillip D. Rack, Ilona Sitnitsky, Matthew D. Bresin, Vincent LaBella, Kathleen Dunn
Abstract
This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples.Pub Type
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Created August 2, 2010, Updated October 12, 2021